Taw qhia rau cov khoom siv raw thiab purity yuav tsum muaj
Cov ntaub ntawv raw tseem ceeb hauv kev tsim cov fiber ntau yog Sicl thiab Gecl, ob qho tib si uas yuav tsum muaj kev coj dawb huv ntawm 99.999% lossis siab dua. Microdisk imururities nyob rau hauv cov ntaub ntawv raw yuav ua rau kev poob qis hauv kev tsim fiber ntau. Yog li ntawd, Sic thiab Gecl yuav tsum tau ua kom huv kom ua tiav qhov xav tau kev coj ua ua ntej siv los ua cov ntaub ntawv raw hauv cov txheej txheem tshiab.
Ithpurity cov ntsiab lus nyob rau hauv raw sicl
Ntawm no, peb yuav tham txog cov txheej txheem lim dej uas siv cov piv txwv ua piv txwv; Ib txoj kev zoo sib xws rau gecl. Nyob rau hauv lub ecitaxial theem ntawm sicl, qhov tseem ceeb tshaj plaws yog trichhlorosilane (Sihol), nrog cov ntsiab lus ntawm kwv yees li 7000 PPM; Kuj tseem muaj cov impurities xws li c- h yuav muab cov sib txuas ua ke (hydrocarbons, tshwj xeeb yog chlorohydins), nrog cov ntsiab lus ntawm kwv yees li 300 PPM; Silanols yog tam sim no nyob ntawm kwv yees li 40 PPM; thiab hlau impurities yog tam sim no nyob rau ntawm kwv yees li 200 ppb.
Kev Ua Purification Txoj Kev Txheej Txheem
Yog tias trichlorosilane tseem nyob rau hauv cov tsim fiber ntau, nws yuav ua rau kev poob qis hauv 0.9-2.5 μm yoj ntau yam. Sihclo thiab lwm yam impurities nyob rau hauv sicl tuaj yeem tshem tau siv cov kev ua kom distillation txoj kev. Seem no piav txog kev siv cov yees duab yees duab ua ke nrog distillation kom tshem tawm trifluorosilanes thiab lwm yam impurities los ntawm Sicl, ua tiav qib siab ntawm Sicl purification.
Cov txheej txheem yees duab yees duab
Cov khoom siv raw, sic, nkag mus rau hauv lub yees duab yees duab los ntawm lub lim. Lub hauv paus ntsiab lus ntawm Photochlorination yog los siv cov kev siv hluav taws xob muaj zog ntawm cov si} h tab tom khi rau ib qho si {{3 zwm. Hauv cov duab yees duab, roj yog qhia, thiab hauv qab ultraviolet irradiation nrog lub waverength ntawm 240-400 nov yog tsim, shair₄ + clj → sicl + hcl.
Kev ua haujlwm txheej txheem
Lub Sicl thiab HLL ua nyob rau hauv cov duab yees duab yees duab, uas muaj cov roj ntsha ua rau HCL lossis rov qab ua kua los ntawm sab saum toj ntawm cov txhuam hniav. Sicl ces ntws rov qab los ntawm hauv qab ntawm cov kws tu sab rau kem distillation rau kev ua kom huv si.
Distillation count purification
Nyob rau hauv kem distillation, ntxiv rau kev tshem tawm txuas ntxiv ntawm Residual HCL thiab lwm cov ntsiab lus tsis huv nyob rau hauv cov cua sov hauv qab hluav taws kub npau npau npau npau npau. Sic muaj qhov qis tshaj plaws npau npau (57 degree), ua rau nws yooj yim sib cais los ntawm impurities. Tshwj xeeb, hydroxyl hydrogens thiab zoo sib xws hydroxyl impurities hauv Silanols tau yooj yim tshem tawm los ntawm sricl los ntawm frectal distillation hauv cov ntsiab lus HCL tsawg. Tus txhuam hniav ua ntej cov ntawv distillation tshem tawm cov nyiaj ntau ntawm HCL, tsim cov kev mob tsim nyog.
Passivation thiab impurity hloov dua siab tshiab
Hauv cov kab ke no, ntxiv rau Sicl Purification (kev tshem tawm kev raug tshem tawm), passivation kuj tseem tshwm sim, piv txwv li, hloov pauv cov khoom siv hluav taws xob hauv kev puas tsuaj. Cov tom kawg, tseem nyob rau hauv lub ntsuas hluav taws xob, yuav tsis ua rau kev nqus lub teeb rau hauv pawg ua haujlwm.
Thib ob distillation thiab kev tshem tawm kev tshem tawm ntxiv
Lub SICL sib cais los ntawm kem distillation kem kuv nkag distillation kem II rau qib kev ua kom huv ntxiv. Lub kaw lus sib xyaw ua ke cov distillation txhua Imm thiab II tseem tuaj yeem tshem tawm tsis tau tsis- scatile c} {cl impurities. Cov impurities no yog tsim los ntawm ntau {{{} h khi imiurrorination, raws li cov duab muaj peev xwm tsuas yog ua piv txwv}}} C yog kev sib txuas. Ib txhij, hlau -}} muaj impurities (suav nrog cov hlau thiab cov hlau tsis muaj zog) kuj tau muab tshem tawm.
Rov qab thiab tshuab cua txias
Cov neeg txias (5 degree) nyob rau sab saum toj ntawm kem distillation thiab cov xib teg kom rov qab so ntawm Sicl Pub thiab txhim kho tus nqi rov qab. Lub kaw lus ua tiav tus nqi SICL rov qab ntawm 99%, thaum tus nqi gecl rov qab ntawm 99.99% yuav tsum muaj. Lub tom kawg yog kim thiab corrosive, ua rau nws tsis zoo rau kev tawm paug. Sicl tso tawm los ntawm kem distillation kem II yog txias los ntawm kev hloov cua sov thiab tom qab ntawd khaws cia rau kev siv tom qab.
Thaum Kawg Purity Specifications
Ib qho infrared spectrometer yog siv los txiav txim siab txog kev coj dawb huv ntawm sicl. Lub impurity cov ntsiab lus hauv sicl huv los ntawm cov kab ke no yog raws li hauv qab no:
C - hid impurities<20 ppm, optimally up to 5 ppm
Ole Pab Pawg Ipurities<20 ppm, optimally up to 5 ppm
Hlau Imerities<20 ppb, optimally up to 2 ppb
